To properly suck and set a work even when the number and the position of suction ports which do not contribute the suction are changed in each case.
The suction table is provided with a table body 41 which has many suction ports arranged to be aligned and on which works are placed in various area, many individual suction flow passages 43 each having one end connected to each suction port 42 and another end extending to an evacuating means 45, many flow passage opening and closing means 46 provided in each individual suction flow passage 43 to be interposed and for opening and closing each individual suction flow passage 43, many measuring means 47 provided in each individual suction flow passage 43 to be interposed and for measuring the suction degree in each individual suction flow passage 43 and a control means 51 for judging whether the suction state of the correspondent individual suction flow passage 43 is in a leakage state or not based on the measured result by the measuring means 47 in the start of the suction of the work W placed on the table body 41 and controlling the flow passage opening and closing means 46 for the individual suction flow passage 43 to close the individual suction flow passage 43 when judging that the individual suction flow passage 43 is in the leakage state.
KAKIZAWA TAKESHI
MIYASAKA YOICHI
