To provide a technique capable of transferring surely a TEM sample to a fixing block by a probe of a manipulator, while observation-confirming a cut-separated condition by an SIM image, in a method for cutting out and preparing the TEM sample from a sample main body by an FIB device.

This method includes a step for preparing a sheetlike cut-out piece 2 and a support part 6 for supporting the cut-out piece in the large sample main body 1 by FIB etching, a step for separating the cut-out piece 2 from the sample main body by the FIB etching, and a step for applying force onto the cut-out piece 2 from the probe by operating the micro-manipulator, while observing the SIM image, to confirm the separation of the cut-out piece from a sample.

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