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Title:
TAPING DEVICE
Document Type and Number:
Japanese Patent JPH05160248
Kind Code:
A
Abstract:

PURPOSE: To improve and stabilize adhesiveness between a semiconductor device and tape by burning fat and oil ingredients adhered on the semiconductor device by combustion gas at a combustion gas processing part.

CONSTITUTION: A semiconductor device 1 supplied from a semiconductor device supplying part 2 is carried to a hydrogen flame processing part 7 by a sucking jig 3. Then, the semiconductor device 1 whose fat and oil ingredients are burnt at the hydrogen flame processing part 7 is carried to a taping part 6 by the sucking jig 3 to be press-bonded with tape 4 and is stored in a tape reel 4 with the tape 4. The oil and fat ingredients adhered on the rear plane of the semiconductor device 1 which is set on a semiconductor aligning jig 8 is burned and removed by hydrogen flame 11 blowing out from a torch 10 which reciprocates horizontally. Thus, the stable semiconductor device which permits high adhesiveness with the tape is provided.


Inventors:
MIYAMOTO TETSUJI
Application Number:
JP35098791A
Publication Date:
June 25, 1993
Filing Date:
December 10, 1991
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01L21/52; H01L21/68; H01L21/683; (IPC1-7): H01L21/52; H01L21/68
Attorney, Agent or Firm:
Hiroshi Murakami (1 outside)



 
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