PURPOSE: To reduce liquid residue on a carrier by forming a notch part which is U-shaped in the bottom direction on a top plane extended at the right angle to the vertical direction on a wafer storing part front edge wall and forming a recessed part at the bottom of the notched part so as to permit the wafer storing part inner edge to be arranged upper than the outer edge.
CONSTITUTION: A carrier 1 which stores a wafer is taken out from liquid such as processing liquid into a wafer storing part 2 which is surrounded by a wafer storing part side wall 7 and wafer storing part front and rear edge walls 4, 5a and 5b. At that time, the liquid on a cut plane 4b flows to the bottom of a notched part 4a along the cut plane 4b by the U-shaped inclination and flows down to the outside of the wafer storing part 2 along the inclined plane of a recessed part 4c provided at the bottom of the notched part 4. Therefore, when the carrier 1 is taken out from the liquid such as processing liquid, the liquid is efficiently exhausted from the cut plane 4b and the recessed part 4c and liquid residue is reduced.
MOTO YUTAKA
TAKEMURA SADAO
| JP1071448B | ||||
| JPH02271623A | 1990-11-06 | |||
| JPH03129824A | 1991-06-03 |
Next Patent: METHOD OF POSITIONING AND RECEIVING WAFER CASSETTE AND CASSETTE RECEIVER