Title:
TEMPERATURE MEASUREMENT DEVICE, METHOD FOR MEASURING TEMPERATURE, LASER INTENSITY DISTRIBUTION MEASUREMENT DEVICE, METHOD FOR MEASURING LASER INTENSITY DISTRIBUTION, SEMICONDUCTOR CIRCUIT EVALUATION DEVICE, AND METHOD FOR EVALUATING SEMICONDUCTOR CIRCUIT
Document Type and Number:
Japanese Patent JP2022037825
Kind Code:
A
Abstract:
To provide a temperature measurement device that can precisely and rapidly measure a temperature distribution of a measurement target sample, a method for measuring a temperature, a laser intensity distribution measurement device, a method for measuring a laser intensity distribution, a semiconductor circuit evaluation device, and a method for evaluating a semiconductor circuit.SOLUTION: A temperature measurement device 1 includes: a light source 11 for generating a measurement laser light Lm as a coherent collimate light; a high-speed camera 16 for taking an image of an interference fringe generated by a multi-reflection between the front surface and the back surface of a measurement target sample 31 in a measurement region on which the measurement laser light Lm is applied; and an evaluation unit for a control unit 20 for measuring the temperature distribution of the measurement target sample 31 on the basis of the interference fringe.SELECTED DRAWING: Figure 1
Inventors:
AZUMA SEIICHIRO
Application Number:
JP2020142167A
Publication Date:
March 09, 2022
Filing Date:
August 25, 2020
Export Citation:
Assignee:
UNIV HIROSHIMA
International Classes:
H01L21/66; G01K11/125
Attorney, Agent or Firm:
Maki Masaki
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