TEMPERATURE-PROGRAMMED DESORPTION ANALYZER, SAMPLE TABLE USED FOR THE SAME, AND TEMPERATURE-PROGRAMMED DESORPTION ANALYTIC METHOD

Japanese Patent JP2016011842

A

PROBLEM TO BE SOLVED: To provide a temperature-programmed desorption analyzer in which, when performing a temperature-programmed desorption analysis of a material containing a subliming metal and low molecular weight gas, sensitivity of a detector does not decrease, quantitative analysis of the gas content and identification of a trap site of the gas is possible, a sample table and an analytic method.SOLUTION: A temperature-programmed desorption analyzer comprises: a vacuum chamber; a detector; a sample stage; a heater; and a sample table consisting of a pair of a box and a lid in which a gold thin film is contained inside of the lid, or a temperature-programmed desorption analyzer comprises: a vacuum chamber; a detector; a filter installed in front of the detector, which includes a metal plate where a gold thin film is contained; a sample stage; a heater; and a sample table consisting of a box. A temperature-programmed desorption analytic method analyzing content of low molecular weight gas and a trap site comprises the steps of: detecting ionic strength of the low molecular weight gas desorbed from a material containing a subliming metal and the low molecular weight gas by use of the temperature-programmed desorption analyzer; and trapping subliming metallic vapor by the gold thin film and obtaining subliming desorption spectrum of the low molecular weight gas at the same time.

OKUMA RYUJI

JP2014132229A

January 21, 2016

June 27, 2014

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SUMIKA CHEM ANALYSIS SERVICES

G01N25/14

JP2006058283A	2006-03-02
JP2012032223A	2012-02-16
JP2005090987A	2005-04-07
JP2006058283A	2006-03-02
JP2012032223A	2012-02-16

Toru Nakayama
Toru Sakamoto

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