PURPOSE: To obtain a highly sensitive compact sensor, by laminating a plurality of sets of pairs of strip members, which yield thermo-electromotive force effect, on a substrate by way of an insulating layer, electrically conducting the end part of each set, and forming a power sensor part of a connected series body.
CONSTITUTION: On a supporting substrate 5, a P type amorphous silicon layer 6 is laminated on a strip shape. An N type amorphous silicon layer 8 is laminated thereon through an intrinsic amorphous silicon layer 7. One end of the layer 8 is lowered along the end of the layer 7 and contacted with the layer 6. Thus an electrical conducting state is formed. N-side and P-side electrodes 9 and 10 are formed at the other end parts of the layer 8 and the layer 6. An intrinsic amorphous silicon layer 11 is deposited on the layer 8. A P type amorphous silicon layer 12 is laminated thereon. One end of the layer 12 is contacted with the electrode 9. An N type amorphous silicon layer 14 is laminated by way of an intrinsic amorphous silicon layer 13. One end of the layer 14 is lowered along the end of the layer 13 and electrically contacted with the layer 12. An N-side electrode 15 is formed at the other end. The voltage of a thermo- electromotive force effect is taken out by the electrodes 10 and 15.
HIJIKIGAWA MASAYA
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