Title:
THIN FILM BULK ACOUSTIC RESONATOR AND IMPROVED METHOD FOR FABRICATING THE SAME
Document Type and Number:
Japanese Patent JP3878032
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a structure of a thin film bulk acoustic resonator easily fabricated and an improved method for fabricating the thin film bulk acoustic resonator.
SOLUTION: This method for fabricating an acoustic resonator arranged on a substrate (202) provided with a surface (204) includes a process for etching a depression part (206) on the surface (204), a process for filling the depression part (206) with sacrificial material, a process for forming an acoustic resonator provided with an etch hole (220) on the substrate and a process for subsequently removing the sacrificial material.
Inventors:
Richard Sea Ruby
Paul Bradley
Yury Oshmyansky
Domingo A Figuered
Paul Bradley
Yury Oshmyansky
Domingo A Figuered
Application Number:
JP2002052627A
Publication Date:
February 07, 2007
Filing Date:
February 28, 2002
Export Citation:
Assignee:
AGILENT TECHNOLOGIES, INC.
International Classes:
H01L41/08; H03H9/17; H01L41/22; H03H3/02; (IPC1-7): H03H9/17; H01L41/08; H01L41/22; H03H3/02
Domestic Patent References:
| JP10126160A | ||||
| JP6204776A |
Attorney, Agent or Firm:
Satoshi Furuya
Takahiko Mizobe
Kimihisa Kato
Takahiko Mizobe
Kimihisa Kato