Title:
THIN FILM FORMING NOZZLE
Document Type and Number:
Japanese Patent JP2000093849
Kind Code:
A
Abstract:
To control film thickness and to form a coating film in a desired area.
In a thin film forming nozzle for forming a thin film of liquid spouted under prescribed pressure on a substrate, there are provided a liquid collecting part 2 to which liquid pressurized to a prescribed pressure is fed and a pair of spouting nozzles 3a, 3b arranged in the liquid collecting part 2 and for spouting the liquid fed to the liquid collecting part 2, and by making liquids spouted from the pair of the spouting nozzles 3a, 3b collide with each other, the spouted liquids and extended in a thin film to form a thin film on a substrate.
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Inventors:
TAKASUGI HITOSHI
Application Number:
JP26754498A
Publication Date:
April 04, 2000
Filing Date:
September 22, 1998
Export Citation:
Assignee:
MITSUMI ELECTRIC CO LTD
International Classes:
B05B1/26; (IPC1-7): B05B1/26
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