Title:
液晶表示装置用薄膜トランジスタ基板及びその製造方法
Document Type and Number:
Japanese Patent JP5355531
Kind Code:
B2
Abstract:
A thin film transistor substrate for a liquid crystal display includes an insulating substrate, and a gate line assembly formed on the substrate. The gate line assembly has a double-layered structure with a lower layer exhibiting good contact characteristics with respect to indium tin oxide, and an upper layer exhibiting low resistance characteristics. A gate insulating layer, a semiconductor layer, a contact layer, and first and second data line layers are sequentially deposited onto the substrate with the gate line assembly. The first and second data line layers are patterned to form a data line assembly, and the contact layer is etched through the pattern of the data line assembly such that the contact layer has the same pattern as the data line assembly. A passivation layer is deposited onto the data line assembly, and a photoresist pattern is formed on the passivation layer by using a mask of different light transmissties mainly at a display area and a peripheral area. The passivation layer and the underlying layers are etched through the photoresist pattern to form a semiconductor pattern and contact windows. A pixel electrode, a supplemental gate pad and a supplemental data pad are then formed of indium tin oxide or indium zinc oxide. The gate and data line assemblies may be formed with a single layered structure. A black matrix and a color filter may be formed at the structured substrate before forming the pixel electrode, and an opening portion may be formed between the pixel electrode and the data line to prevent possible short circuits.
Inventors:
Woon-Young, Park
John-So, Yoon
Chan-Oh, John
John-So, Yoon
Chan-Oh, John
Application Number:
JP2010243506A
Publication Date:
November 27, 2013
Filing Date:
October 29, 2010
Export Citation:
Assignee:
Samsung Display Co.,Ltd.
International Classes:
G02F1/1333; G02F1/1368; G02F1/1335; G02F1/136; G02F1/1362; G09F9/00; G09F9/30; H01L21/336; H01L21/77; H01L21/84; H01L27/12; H01L29/45; H01L29/49; H01L29/786
Domestic Patent References:
| JP9236827A | ||||
| JP9292633A | ||||
| JP10123567A | ||||
| JP62035669A | ||||
| JP10142628A | ||||
| JP10163174A |
Other References:
三国電子IPSTFT-LCDを2PEPで製造するプロセスを考案 TFTチャネル部分をハーフトーン露光,月刊FPDIntelligence,日本,株式会社プレスジャーナル,1999年 4月15日,1999年5月号/第4巻/第6号,31-35
Attorney, Agent or Firm:
Yamashita