Title:
三元アルミニウム合金膜およびターゲット
Document Type and Number:
Japanese Patent JP2009532587
Kind Code:
A
Abstract:
A physical vapor deposition target for the manufacturing of flat panel displays is provided. The target includes a ternary alloy system having, by atom percent, a first component in an amount of about 90 to 99.98, wherein the first component is aluminum, a second component in an amount of about 0.01 to 2.0, wherein the second component is a rare earth element selected from the group consisting of Nd, Ce, Dy and Gd, and a third component in an amount of about 0.01 to 8.0, wherein the third element is selected from the group consisting of Ni, Co, Mo, Sc, and Hf.
Inventors:
Sarkar, Jay Deep
Lo, Ji-Hun
Gilman, Paul, S.
Lo, Ji-Hun
Gilman, Paul, S.
Application Number:
JP2009504207A
Publication Date:
September 10, 2009
Filing Date:
March 28, 2007
Export Citation:
Assignee:
Praxair Technology Incorporated
International Classes:
C23C14/34; C22C21/00; C22F1/02; C22F1/04; H01L21/28; H01L21/285; C22F1/00
Domestic Patent References:
| JP2000294556A | 2000-10-20 | |||
| JP2004214606A | 2004-07-29 | |||
| JPH0693393A | 1994-04-05 | |||
| JP2003103821A | 2003-04-09 | |||
| JP2002117587A | 2002-04-19 | |||
| JP2002129313A | 2002-05-09 |
Foreign References:
| US5541007A | 1996-07-30 |
Attorney, Agent or Firm:
Asamura patent office
Hideto Asamura
Hajime Asamura
Yutaka Yoshida
Toru Mori
Katsunori Shirae
Hirohiro Yokota
Tadashi Tanaka
Ken Kanai
Hideto Asamura
Hajime Asamura
Yutaka Yoshida
Toru Mori
Katsunori Shirae
Hirohiro Yokota
Tadashi Tanaka
Ken Kanai