【発明の名称】超精密研磨用ガイドロ-ラ - Nippon Telegraph and Telephone Corporation

Title:

【発明の名称】超精密研磨用ガイドロ-ラ

Document Type and Number:

Japanese Patent JPH0665463

Kind Code:

B2

Inventors:

Toshio Doi
Junji Watanabe

Application Number:

JP21596386A

Publication Date:

August 24, 1994

Filing Date:

September 16, 1986

Export Citation:

Assignee:

Nippon Telegraph and Telephone Corporation

International Classes:

B24B31/108; B24B37/00; B24B37/04; B24B37/30; (IPC1-7): B24B37/04

Attorney, Agent or Firm:

Yasuo Miyoshi (1 outside)

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