Title:
【発明の名称】低温冷却装置
Document Type and Number:
Japanese Patent JP3335980
Kind Code:
B2
More Like This:
Inventors:
Toshio Katsuyama
Kazuhiko Hosomi
Kazuhiko Hosomi
Application Number:
JP2000065683A
Publication Date:
October 21, 2002
Filing Date:
March 06, 2000
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G01N21/64; G01N21/01; (IPC1-7): G01N21/01; G01N21/64
Domestic Patent References:
JP61233343A | ||||
JP8166331A | ||||
JP6259853U |
Attorney, Agent or Firm:
Katsuo Ogawa (1 person outside)