【発明の名称】微小研磨方法

Japanese Patent JPH0777704

B2

A microscopic grinding device grinds a workpiece (W) at ultrahigh precision with the use of magnetic grinding fluid (M) actuated microscopically in three dimensional directions by Z- and XY-axis actuators (20, 22). The magnetic grinding fluid (M) is magnetically supported between a grinding member (24,26) and the workpiece (W) by the magnetic field. Because magnetic field is generated to form a magnetic circuit within the device itself where no workpiece is necessary to form the magnetic circuit, the device can be used with equal results even with workpieces made from non-magnetic material. The pressure applied to the workpiece (W) by the grinding member (24,26) via the magnetic grinding fluid (M) is detected by a load cell (60) for feeding back a signal indicative of the detected pressure to the controller (61). The controller (61) controls the actuators (20, 22) to actuate the grinding member (22) such that the pressure applied from the grinding member (24, 26), via the magnetic fluid (M), to the workpiece (W) is maintained within a predetermined range.

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Shinichi Mizuguchi
Ueda Shuji
Koji Kato
Umehara Tokuji

JP31471689A

August 23, 1995

December 04, 1989

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Matsushita Electric Industrial Co., Ltd

B24B31/112; B23Q1/34; B24B1/00; B24B13/00; B24B35/00; B24B37/00; G01Q20/04; G01Q60/32; (IPC1-7): B24B37/00

JP58192737A
JP62113961U

Akira Kobiji (2 outside)

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