【発明の名称】プラズマ処理装置 - Nippon Vacuum Technology Co., Ltd.

Title:

【発明の名称】プラズマ処理装置

Document Type and Number:

Japanese Patent JP3100242

Kind Code:

B2

Inventors:

Akira Hoshino
Kenichi Takagi
Kazuo Takayama
Eiji Yabe

Application Number:

JP30088292A

Publication Date:

October 16, 2000

Filing Date:

November 11, 1992

Export Citation:

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Assignee:

Nippon Vacuum Technology Co., Ltd.

International Classes:

C23C14/35; C23C14/34; H01L21/203; H01L21/205; H01L21/302; H01L21/3065; (IPC1-7): H01L21/205; C23C14/35; H01L21/203; H01L21/3065

Domestic Patent References:

JP4180557A
JP6160881A
JP5947381A

Attorney, Agent or Firm:

Shigeru Yagita (4 outside)

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