Title:
【発明の名称】磁性流体を用いた研磨装置
Document Type and Number:
Japanese Patent JPH0661697
Kind Code:
B2
Inventors:
Ryouji Koseki
Application Number:
JP8148685A
Publication Date:
August 17, 1994
Filing Date:
April 18, 1985
Export Citation:
Assignee:
Amada Engineering and Service Company-Inco-Pole-Ted
International Classes:
B24B31/112; B24B37/00; B24C5/08; (IPC1-7): B24B37/00
Domestic Patent References:
| JP591160A | ||||
| JP5973272A | ||||
| JP4842495A |
Attorney, Agent or Firm:
Yasuo Miyoshi (1 outside)