Title:
【発明の名称】X線露光装置
Document Type and Number:
Japanese Patent JP2711537
Kind Code:
B2
Inventors:
Suzuki Masayuki
Noritaka Mochizuki
Yutaka Watanabe
Shigetaro Ogura
Kariya Takuo
Fukuda Keimei
Kawai Yasuo
Setsuo Minami
Noritaka Mochizuki
Yutaka Watanabe
Shigetaro Ogura
Kariya Takuo
Fukuda Keimei
Kawai Yasuo
Setsuo Minami
Application Number:
JP14861587A
Publication Date:
February 10, 1998
Filing Date:
June 15, 1987
Export Citation:
Assignee:
Canon Inc
International Classes:
G01B11/26; G03F7/20; G03F9/00; G05D3/12; H01L21/027; H01L21/30; (IPC1-7): G05D3/12; G01B11/26; G03F9/00; H01L21/027
Domestic Patent References:
| JP61258426A | ||||
| JP58152243A | ||||
| JP6362231A |
Attorney, Agent or Firm:
Tetsuya Ito (1 outside)