Title:
【発明の名称】X線露光装置
Document Type and Number:
Japanese Patent JP2980397
Kind Code:
B2
Inventors:
AMAMYA MITSUAKI
MYAKE AKIRA
MYAKE AKIRA
Application Number:
JP8436091A
Publication Date:
November 22, 1999
Filing Date:
March 26, 1991
Export Citation:
Assignee:
KYANON KK
International Classes:
G03F7/20; G21K1/06; H01L21/027; H01L21/30; H05H13/04; (IPC1-7): H01L21/027; G03F7/20; G21K1/06; H05H13/04
Domestic Patent References:
| JP4112523A | ||||
| JP3212927A | ||||
| JP353200A | ||||
| JP6165434A |
Attorney, Agent or Firm:
Wakabayashi Tadashi