Title:
【発明の名称】X線発生方法及びX線発生装置及びこれを有するX線露光装置
Document Type and Number:
Japanese Patent JP3371444
Kind Code:
B2
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Inventors:
Hiroyuki Kondo
Application Number:
JP10987292A
Publication Date:
January 27, 2003
Filing Date:
April 28, 1992
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G21K1/00; H05G1/00; H05G2/00; (IPC1-7): H05G2/00; H05G1/00
Domestic Patent References:
| JP1137543A | ||||
| JP58116731A | ||||
| JP61158656A | ||||
| JP58109900A |