Title:
【発明の名称】研磨槽の仕切方法および研磨槽
Document Type and Number:
Japanese Patent JPH0749182
Kind Code:
B2
Inventors:
OONO IETATSU
Application Number:
JP18977990A
Publication Date:
May 31, 1995
Filing Date:
July 18, 1990
Export Citation:
Assignee:
OONO IETATSU
International Classes:
B24B31/12; (IPC1-7): B24B31/12
Domestic Patent References:
| JP56126569A | ||||
| JP5416872Y2 | ||||
| JP4947280Y2 |
Foreign References:
| US3423884A | ||||
| US2019454A |
Attorney, Agent or Firm:
Miyuki Fujiki