Title:
TOOL PLATE FOR POLISHING
Document Type and Number:
Japanese Patent JP2003311606
Kind Code:
A
Abstract:
To provide a tool for polishing used for a complex abrasive grain polishing method, improving machining efficiency, highly flattening a polished surface, with no possibility of occurrence of scratch, relatively less abrasion of the machined surface, and having long service life.
This tool plate for polishing is used for the polishing method using a polishing abrasive made of mother grains and fine abrasive grains held on the mother grains. The tool plate is made of dense substrate having shore hardness smaller than that of the mother grains.
Inventors:
TANI YASUHIRO
KAWADA KENJI
ENOMOTO TOSHIYUKI
TONAMI TOKIO
TOGAWA CHIHIRO
KAWADA KENJI
ENOMOTO TOSHIYUKI
TONAMI TOKIO
TOGAWA CHIHIRO
Application Number:
JP2002126259A
Publication Date:
November 05, 2003
Filing Date:
April 26, 2002
Export Citation:
Assignee:
TANI YASUHIRO
NIPPON MICRO COATING KK
TOSHIBA CERAMICS CO
NIPPON MICRO COATING KK
TOSHIBA CERAMICS CO
International Classes:
B24B37/00; B24B37/12; B24B37/14; B24B37/20; B24B37/24; H01L21/304; (IPC1-7): B24B37/04; B24B37/00; H01L21/304
Attorney, Agent or Firm:
Hisano Hatano (1 person outside)
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