Title:
TOTAL FOCUS REFLECTION TYPE OPTICAL MICROSCOPE
Document Type and Number:
Japanese Patent JP2963995
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a total focus reflection type optical microscope capable of focusing on all the surface at the time of observing a super thin film sample on a substrate through a reflection type microscope.
SOLUTION: As for the optical microscope, by making p-polarized illumination light 2 incident on the substrate 3 on which the thin film sample 4 is placed, at a polarization angle θ1 and making the reflected light 5 incident not on the center of an image forming lens 6 but on the end of the lens 6 so as to constitute a non-axial optical system, a tilt angle formed by an axis vertical to an image field 8 and the optical axis 9 of the microscope is decreased, and also, the photoelectric surface 7 of a CCD camera is arranged so as to be aligned with the image field 8.
Inventors:
Yokoyama, Hiroshi
Tanabe, Yuka
Tanabe, Yuka
Application Number:
JP1998000266061
Publication Date:
August 13, 1999
Filing Date:
September 21, 1998
Export Citation:
Assignee:
AGENCY OF IND SCIENCE & TECHNOL
International Classes:
G02B21/00; G02B21/06; G02B21/36; (IPC1-7): G02B21/06; G02B21/00; G02B21/36