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Title:
TRANSMISSION ELECTRON MICROSCOPE AND METHOD FOR CORRECTING VISUAL FIELD DEVIATION
Document Type and Number:
Japanese Patent JP2011228223
Kind Code:
A
Abstract:

To provide a transmission electron microscope in which a transmission image of a sample is displayed on a display in real time, and visual field deviation by sample drift is automatically corrected.

A computer to control the transmission electron microscope includes at least two memories for image processing in order to calculate movement of a transmission image position other than an image memory for display in order to display the transmission image of the sample on the display, and an arithmetic unit which calculates the movement of the transmission image position from the images retained in the memories for image processing and transmits a correction signal to a visual field correction device for correcting the visual field deviation by changing the sample position.


Inventors:
MISE HIROMI
YOTSUTSUJI TAKAFUMI
Application Number:
JP2010099358A
Publication Date:
November 10, 2011
Filing Date:
April 23, 2010
Export Citation:
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Assignee:
HITACHI HIGH TECH CORP
International Classes:
H01J37/26; H01J37/22
Domestic Patent References:
JP2008046696A2008-02-28
JP2006114251A2006-04-27
JPH1032810A1998-02-03
JPS6174249A1986-04-16
JPS63202834A1988-08-22
JPH08273568A1996-10-18
JP2004047340A2004-02-12
JPH07272665A1995-10-20
JPH05343020A1993-12-24
JPS63225467A1988-09-20
JPH05340712A1993-12-21
JP2001006599A2001-01-12
JPH0279351A1990-03-19
JPS6174249A1986-04-16
JPS63202834A1988-08-22
JPH08273568A1996-10-18
JP2004047340A2004-02-12
JP2008046696A2008-02-28
JP2006114251A2006-04-27
JPH1032810A1998-02-03
Attorney, Agent or Firm:
Manabu Inoue
Yuji Toda