Title:
透過型電子顕微鏡及び試料観察方法
Document Type and Number:
Japanese Patent JP4012813
Kind Code:
B2
Abstract:
Preparations are made for the transmission image of an object tilted as a reference image and the image obtained by polar coordinate conversion of this transmission image, and correlation is established with the image obtained by polar coordinate conversion of the transmission image of the object in a sample.
Inventors:
Nakazawa Eiko
Nagaoki Isao
Nagaoki Isao
Application Number:
JP2002343776A
Publication Date:
November 21, 2007
Filing Date:
November 27, 2002
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
Hitachi High-Tech Science Systems Co., Ltd.
Hitachi High-Tech Science Systems Co., Ltd.
International Classes:
G01N23/04; G06T1/00; H01J37/22; G06T3/00; G06T7/00; H01J37/26
Domestic Patent References:
| JP2002025491A | ||||
| JP64023379A | ||||
| JP62078684A | ||||
| JP2001118535A | ||||
| JP2001006588A | ||||
| JP2001068050A | ||||
| JP8096132A | ||||
| JP9245709A |
Attorney, Agent or Firm:
Yusuke Hiraki