Title:
超高純度気体供給設備
Document Type and Number:
Japanese Patent JP3744614
Kind Code:
B2
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Inventors:
Kunihiro Sakata
Hiroshi Nonaka
Tokunaga Shingo
Suenaga Toshinori
Hidenori Susumu
Fujiwara Goro
Shinji Hattori
Naoki Irie
Hiroshi Nonaka
Tokunaga Shingo
Suenaga Toshinori
Hidenori Susumu
Fujiwara Goro
Shinji Hattori
Naoki Irie
Application Number:
JP21746396A
Publication Date:
February 15, 2006
Filing Date:
August 19, 1996
Export Citation:
Assignee:
Kyushu NEC Corporation
Dan Takuma Co., Ltd.
Dan Takuma Co., Ltd.
International Classes:
F24F7/06; B01D46/00; B01D53/04; H01L21/02
Domestic Patent References:
| JP8200738A | ||||
| JP8024534A | ||||
| JP49030277A |
Attorney, Agent or Firm:
Shuichiro Kitamura
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