PURPOSE: To uniformize the thickness of a film in a dome by using the cylindrical dome for holding a body to be vapor-deposited, holding the body by the cylindrical part of the dome and arranging the body obliquely above a vaporization source.
CONSTITUTION: The cylindrical dome 3 is used, a glass substrate 7 to be vapor- deposited is vertically held in plural stages, and the angle between a line connecting the center of the vapor deposition source 4 or 5 in a vapor-deposition vessel 2 and the center of each substrate 7 and the plane of the substrate 7 is controlled to ≤80° by holding the dome 3 and the substrate 7 obliquely above the source 4 or 5 in the vessel 2. The vapor-deposition material from the source 4 or 5 heated and melted by an electron beam 6 is injected onto the substrate 7 held by the dome 3 at an angle of ≤80° to form a film. Consequently, the material injected on the substrate 7 is grown in the injecting direction, and a crystal is oriented. Accordingly, an He-Ne laser mirror having optical anisotropy is produced.
JPS49119876A | 1974-11-15 |