Title:
VACUUM LAMINATION DEVICE AND METHOD
Document Type and Number:
Japanese Patent JP2948508
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a vacuum lamination device and method for increase area and for reducing treatment time with a simple structure.
SOLUTION: A cylindrical pipe 102 is formed in an annular body and a plurality of deaeration holes 105 are formed on the wall of the inner-periphery side of the annular body. The annular body is installed and fixed on a sheet- shaped base 101 and a space part is constituted for lamination treatment by the base 101 and the annular body. A lid member covers the space part and the formed space part is evacuated. While maintaining the evacuation, lamination treatment space is subjected to heat treatment. Lamination treatment is performed to a material arranged in the lamination treatment space by the brief and simple treatment.
Inventors:
ITOYAMA SEIKI
INOE JUJI
FUKAE KIMITOSHI
INOE JUJI
FUKAE KIMITOSHI
Application Number:
JP20419695A
Publication Date:
September 13, 1999
Filing Date:
August 10, 1995
Export Citation:
Assignee:
KYANON KK
International Classes:
H01L31/04; B29C63/02; H01L31/042; (IPC1-7): H01L31/04; B29C63/02; H01L31/042
Domestic Patent References:
| JP5200880A | ||||
| JP5293895A | ||||
| JP5856369A | ||||
| JP685307A | ||||
| JP6382538U | ||||
| JP2133336U |
Attorney, Agent or Firm:
Fukumori Hisao
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