Title:
VERTICAL-TYPE HEAT TREATMENT FURNACE AND HEAT TREATMENT
Document Type and Number:
Japanese Patent JP3254747
Kind Code:
B2
Abstract:
PURPOSE: To keep the uniformity of a temperature and an atmosphere by a low-cost constitution and to make an apparatus small-sized in a vertical-type heat treatment furnace composed of a plurality of furnaces suitable for a large- sized substrate.
CONSTITUTION: In a vertical-type heat treatment furnace composed of a plurality of frunace bodies, temperature sensors 14, 15, 27, heater controllers 17, 26 and a changeover device 16 for the temperature sensors are installed, and the temperature of the furnace bodies is controlled so as to interlock with the movement of a substrate 10 by the instruction of a central controller 18. In addition, the detection means of a gas supply amount and an exhaust amount is installed and controlled by the instruction of the central controller 18 in the same manner.
Inventors:
Akihiro Kakumochi
Kunihiro Yagi
Takahiro Ohkuro
Kuji Ohtake
Kunihiro Yagi
Takahiro Ohkuro
Kuji Ohtake
Application Number:
JP23569492A
Publication Date:
February 12, 2002
Filing Date:
September 03, 1992
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01L21/324; G06F19/00; H01L21/22; H01L21/31; (IPC1-7): H01L21/22; G06F19/00; H01L21/31; H01L21/324
Domestic Patent References:
| JP269932A | ||||
| JP63260016A | ||||
| JP6192050U |
Attorney, Agent or Firm:
Masayuki Watanabe (1 person outside)