To prevent deterioration of washing performance while suppressing noise by setting an air supply flow rate to a liquid phase part within a prescribed range.
A washing tank 3 stores a liquid, and an object to be washed 2 is immersed. The washing tank 3 includes a pressure reducing means 5 and a liquid phase air supply means 6. The pressure reducing means 5 sucks to exhaust a gas in the washing tank 3 to the outside, and the pressure of the inside of the washing tank 3 is reduced. The liquid phase air supply means 6 introduces outside air to the liquid phase part in the pressure reduced washing tank 3 with the pressure reducing means 5. In addition, the liquid phase air supply means 6 is provided with a flow rate limit means for throttling the outside air inflow amount to the inside of the washing tank 3. The flow rate limit means is constituted of an orifice 18 for instance.
FUJII SHINJI
NISHIHARA YOHEI
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