Title:
ウェルプレートの搬送・廃棄構造
Document Type and Number:
Japanese Patent JP4423370
Kind Code:
B2
More Like This:
| JP2003297895 | WAFER HANDLING ROBOT |
| JPH0553881 | [Name of device] Electromagnetic type hand device |
| JPH10235588 | ARTICLE GRIPPING DEVICE |
Inventors:
Yoshihiro Kawajiri
Application Number:
JP2001245956A
Publication Date:
March 03, 2010
Filing Date:
August 14, 2001
Export Citation:
Assignee:
Tamagawa Seiki Co., Ltd.
International Classes:
B25J15/08; B65F1/00; B65F5/00
Domestic Patent References:
| JP1226693A | ||||
| JP61164791A |
Attorney, Agent or Firm:
Michiharu Soga
Yutaka Ikeya
Hidetoshi Furukawa
Suzuki Kenchi
Kajinami order
Yutaka Ikeya
Hidetoshi Furukawa
Suzuki Kenchi
Kajinami order