Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
WIRE SAW AND CUTTING METHOD USING IT
Document Type and Number:
Japanese Patent JP2001328058
Kind Code:
A
Abstract:

To provide a wire saw manufacturing silicon wafers with uniform thickness and to provide a cutting method using it.

This wire saw is provided with slack adjusting means 8 and 8 provided between a workpiece 7 and a pair of multi-grooved rollers 3d and 3d arranged across the workpiece 7 so as to freely advance/retreat respectively and adjusting slack of a wire row 4 by appropriately pushing the wire row 4 abutting on the workpiece 7. The wire row 4 is slackened by the slack adjusting means 8 and 8 in starting the cutting process by advancing/retreating the adjusting means 8 and 8, and the wire row 4 is continuously pushed by the slack adjusting means 8 and 8 in the latter stage of the cutting process, so that the cutting works are performed with the slack of the wire row 4 held as it is.


Inventors:
OKUBO KAZUYA
ISOGAI HIROMICHI
Application Number:
JP2000153715A
Publication Date:
November 27, 2001
Filing Date:
May 24, 2000
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TOSHIBA CERAMICS CO
International Classes:
B24B27/06; B28D5/04; (IPC1-7): B24B27/06; B28D5/04
Attorney, Agent or Firm:
Hisano Hatano (1 person outside)