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Title:
X-RAY FOREIGN MATER DETECTOR AND METHOD OF DETECTING DEFECTIVE IN THE DETECTOR
Document Type and Number:
Japanese Patent JP3875842
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To improve the reliability of a detector by accurately detecting a defective.
SOLUTION: A mask region setting part 17a of a deficiency detecting part 17 sets a mask region M for deficiency detection on the basis of a storage body T of an inspected object W. An inspected object extracting part 17b extracts an extracted image A of only the inspected object W from the data of the amount of X-ray transmission outputted from an X-ray detector 3. When the rate of the extracted image A of the inspected object W included in the mask region M is lower than a prescribed value, a deficiency determining part 17c determines the defective being accommodated in the storage body without the inspected object. Even when only a part of the extracted image A is included in the mask region M due to the movement of the inspected object W in the storage body T, erroneous detection of deficiency by the determination using the rate can be prevented to attain the accurate detection of the defective.


Inventors:
Takayuki Seki
Masahiro Yagi
Keiji Yasuda
Application Number:
JP2001026940A
Publication Date:
January 31, 2007
Filing Date:
February 02, 2001
Export Citation:
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Assignee:
Anritsu Industrial Machinery System Co., Ltd.
International Classes:
G01N23/04; G01V8/10; G01V5/00; (IPC1-7): G01V5/00; G01N23/04
Domestic Patent References:
JP2000309312A
Attorney, Agent or Firm:
Norimitsu Nishimura