Title:
X線検査装置
Document Type and Number:
Japanese Patent JP7108564
Kind Code:
B2
Abstract:
To provide an X-ray inspection device which is secured in safety as an X-ray inspection device and has high inspection accuracy.SOLUTION: X-ray irradiation means 4 irradiates an inspection object W conveyed by conveyance means 3 inside a housing 2 with X-ray from a lateral direction, and X-ray detection means 5 detects a transmitted X-ray. Detection sensors 10 detecting the presence of a substance which is not the inspection object W are provided at an inlet 6 and an outlet 7, respectively. Long tabular guide members 15, 16 composed of a material that allows for light and X-ray to pass through are arranged so as to guide the inspection object W. The number of pieces and position of detection sensors, the direction of an optical path, etc., can be arbitrarily set without considering relations with the guide members. Stable conveyance unaffected by the height of an inspection object is materialized by the guide members and the guide members do not affect inspection by an X-ray, so that inspection accuracy is improved.SELECTED DRAWING: Figure 2
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Inventors:
Kengo Yamaguchi
Application Number:
JP2019040729A
Publication Date:
July 28, 2022
Filing Date:
March 06, 2019
Export Citation:
Assignee:
Anritsu Co., Ltd.
International Classes:
G01N23/04; G01N23/18
Domestic Patent References:
JP2018138899A | ||||
JP2011117825A | ||||
JP2001311699A | ||||
JP2011102745A | ||||
JP2007276854A | ||||
JP2017515112A | ||||
JP2016535861A |
Attorney, Agent or Firm:
Nishimura Norimitsu
Noriyuki Suzuki
Noriyuki Suzuki
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