Title:
YIELD CONTROL SYSTEM AND DEVICE AS OBJECT THEREOF
Document Type and Number:
Japanese Patent JP2001196429
Kind Code:
A
Abstract:
To enable statistical processing to be accurately and easily carried out.
A quantitative element analysis of foreign matter and defective portion of an object is carried out (steps S2 and S4), elements meeting decision conditions are selected out from the analysis result (step S5), the names of the selected elements are registered in a defect database(DB) lined with information on the foreign matter and defective portion (step S6). The registered names of elements are statistically processed, by which a statistical processing result as accurate as that based on a qualitative analysis can be obtained without a complicated computational processing.
More Like This:
| JP2007192595 | INSPECTION METHOD AND DEVICE |
| JP5584551 | A particle beam device and a method |
Inventors:
KATAYAMA TOSHIHARU
Application Number:
JP2000000878A
Publication Date:
July 19, 2001
Filing Date:
January 06, 2000
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
G01N23/225; G01N21/35; G01N21/3563; G01N21/65; G01N21/94; G01N21/956; G01N27/62; H01L21/02; H01L21/66; (IPC1-7): H01L21/66; G01N21/35; G01N21/65; G01N21/94; G01N21/956; G01N23/225; G01N27/62; H01L21/02
Domestic Patent References:
| JPH11316201A | 1999-11-16 | |||
| JPH0247542A | 1990-02-16 | |||
| JPH11352081A | 1999-12-24 |
Attorney, Agent or Firm:
Shigeaki Yoshida (2 outside)