Title:
CHUCKS AND CLAMPS FOR HOLDING OBJECTS OF LITHOGRAPHIC APPARATUS, AND METHODS FOR CONTROLLING TEMPERATURE OF OBJECT HELD BY CLAMP OF LITHOGRAPHIC APPARATUS
Document Type and Number:
Japanese Patent JP2022023178
Kind Code:
A
Abstract:
To provide chucks and clamps for holding objects of a lithographic apparatus, and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus.SOLUTION: A lithographic apparatus includes a clamp (406) configured to receive an object (402). The clamp defines at least one channel (408) configured to pass a fluid at a first fluid temperature. The lithographic apparatus also includes a chuck (404) coupled to the clamp. The chuck (404) defines at least one void (464) configured to thermally insulate the chuck from the clamp.SELECTED DRAWING: Figure 16
Inventors:
KOEVOETS ADRIANUS HENDRIK
RAYMOND WILHELMUS LOUIS LAFARRE
MICHAEL LEO NELSON
JACOBUS CORNELIS GERARDUS VAN DER SANDEN
MICHAEL ANDREW CHIEDA
TAMMO UITTERDIJK
O'CONNER GEOFFREY
RAYMOND WILHELMUS LOUIS LAFARRE
MICHAEL LEO NELSON
JACOBUS CORNELIS GERARDUS VAN DER SANDEN
MICHAEL ANDREW CHIEDA
TAMMO UITTERDIJK
O'CONNER GEOFFREY
Application Number:
JP2021175870A
Publication Date:
February 07, 2022
Filing Date:
October 27, 2021
Export Citation:
Assignee:
ASML HOLDING NV
ASML NETHERLANDS BV
ASML NETHERLANDS BV
International Classes:
G03F7/20
Domestic Patent References:
| JP2006148101A | 2006-06-08 | |||
| JPH11135407A | 1999-05-21 | |||
| JPH07106244A | 1995-04-21 | |||
| JP2015035448A | 2015-02-19 | |||
| JP2007142238A | 2007-06-07 | |||
| JP2009200486A | 2009-09-03 |
Foreign References:
| WO2014122151A2 | 2014-08-14 | |||
| CN103904014A | 2014-07-02 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
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