Title:
IMAGE INSPECTION DEVICE AND IMAGE INSPECTION METHOD
Document Type and Number:
Japanese Patent JP2016219659
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a device and method that automatically positions a wafer without providing a camera separately from an inspection optical system.SOLUTION: An image inspection device comprises: a microscopy 2 having a revolver 21 for switching between a positioning lens having a field of view for ensuring a range of position error on a movable table 1 of a positioning chip, and an inspection lens. A control unit includes: a storage unit storing a position on a wafer 10 of the positioning chip; a lens switching unit for switching to the positioning lens; a moving unit for setting the stored position to a target position in an observation region; a chip detection unit for detecting the positioning chip; a positional deviation amount detection unit for detecting an amount of positional deviation from the target position of the detected positioning chip; and a position correction unit for correcting the position of the wafer 10 on the basis of the detected amount of position deviation.SELECTED DRAWING: Figure 1
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Inventors:
KONDO NAOMI
Application Number:
JP2015104694A
Publication Date:
December 22, 2016
Filing Date:
May 22, 2015
Export Citation:
Assignee:
AZBIL CORP
International Classes:
H01L21/66; G01B11/00; G01N21/956; G06T1/00
Attorney, Agent or Firm:
Hideaki Tazawa
Hamada Hatsune
Nakashima Shigeru
Hideo Kawamura
Tatsuya Sakamoto
Tsujioka Masaaki
Hamada Hatsune
Nakashima Shigeru
Hideo Kawamura
Tatsuya Sakamoto
Tsujioka Masaaki