Title:
An imprint method, an imprint device, and a manufacturing method of an article
Document Type and Number:
Japanese Patent JP6157579
Kind Code:
B2
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Inventors:
Hiroshi Kurosawa
Application Number:
JP2015252363A
Publication Date:
July 05, 2017
Filing Date:
December 24, 2015
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; B29C59/02
Domestic Patent References:
| JP2010069762A | ||||
| JP2012504336A | ||||
| JP2010080630A | ||||
| JP2007296783A | ||||
| JP2007140460A | ||||
| JP2010056152A | ||||
| JP2005286062A | ||||
| JP2009266841A | ||||
| JP5107744A | ||||
| JP2010005971A | ||||
| JP2005064094A | ||||
| JP2011513973A | ||||
| JP2007250370A |
Foreign References:
| US20100072647 | ||||
| US20090214761 |
Attorney, Agent or Firm:
Yasunori Otsuka
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
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