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Title:
MANUFACTURING METHOD OF METAL NANOPARTICLE SINTERED FILM
Document Type and Number:
Japanese Patent JP2018003068
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a manufacturing method of a metal nanoparticle sintered film fine in fusion of metal particles, good in adhesiveness to a substrate and capable of mass production of a sintered film exhibiting sufficient conductivity by sintering metal nanoparticles each other by light irradiation in ultra short time.SOLUTION: There is provided a method for making a film exhibiting good conductivity by enhancing a fine fusion of metal particles and adhesiveness of a substrate by sintering a coated film containing metal nanoparticles by flash light irradiation in short time, further a method of a semiconductor element, a thin film transistor and an electronic device including the method for making the film.SELECTED DRAWING: Figure 1

Inventors:
YAMAGUCHI RYOTA
OKAMOTO TOMOKO
Application Number:
JP2016128473A
Publication Date:
January 11, 2018
Filing Date:
June 29, 2016
Export Citation:
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Assignee:
DAINIPPON INK & CHEMICALS
International Classes:
B22F7/04; B22F1/00; B22F3/10; H05K1/09; H05K3/12
Domestic Patent References:
JP2016039007A2016-03-22
JP2016508164A2016-03-17
JP2014011412A2014-01-20
JP2013064191A2013-04-11
JP2015133317A2015-07-23
Attorney, Agent or Firm:
Kono Tsuyo