Title:
A manufacturing method of an organic EL device
Document Type and Number:
Japanese Patent JP6080438
Kind Code:
B2
Abstract:
Provided is a method of manufacturing an organic electroluminescence display device which enables production of a high-resolution organic electroluminescence display device in which display failure is suppressed. The method of manufacturing an organic electroluminescence display device includes multiple organic electroluminescence elements each including an organic compound layer that includes at least an emission layer, the method including: forming the organic compound layer on a substrate; sequentially forming an intermediate layer and a resist layer on the organic compound layer; removing a part of the resist layer by a photolithography method; and selectively removing, by dry etching, the intermediate layer and the organic compound layer in a region in which the part of the resist layer is removed, the light shielding layer having a function of blocking light having a wavelength of 190 nm or more and 360 nm or less.
Inventors:
Daisuke Yutoku
Nobuhiko Sato
Nobuhiko Sato
Application Number:
JP2012191772A
Publication Date:
February 15, 2017
Filing Date:
August 31, 2012
Export Citation:
Assignee:
Canon Inc
International Classes:
H05B33/10; H01L51/50; H05B33/12
Domestic Patent References:
| JP2004055367A | ||||
| JP200658497A | ||||
| JP2008218423A | ||||
| JP2003332051A | ||||
| JP200932476A |
Attorney, Agent or Firm:
Keisuke Watanabe
Yoshihiro Yamaguchi
Yoshihiro Yamaguchi