Title:
A manufacturing method of an organic luminescent device
Document Type and Number:
Japanese Patent JP6080437
Kind Code:
B2
Abstract:
A method for manufacturing a light-emitting device includes a step of forming an etching resistant protection layer on a substrate provided with an organic planarizing layer, a step of forming a plurality of electrodes on the etching resistant protection layer, a step of forming an organic compound layer on the substrate provided with the plurality of electrodes, a step of forming a resist layer on the organic compound layer formed on parts of electrodes among the plurality of electrodes using a photolithographic method, and a step of removing the organic compound layer in a region not covered with the resist layer by dry etching, wherein an entire surface of the organic planarizing layer on the substrate on which steps up to the step of forming the plurality of electrodes have been performed is covered with at least one of the etching resistant protection layer and the electrode.
Inventors:
Manabu Otsuka
Tomoyuki Hiroki
Tomoyuki Hiroki
Application Number:
JP2012191771A
Publication Date:
February 15, 2017
Filing Date:
August 31, 2012
Export Citation:
Assignee:
Canon Inc
International Classes:
H05B33/10; H01L51/50; H05B33/12; H05B33/22
Domestic Patent References:
| JP2005108825A | ||||
| JP2008147072A | ||||
| JP2005352465A |
Foreign References:
| US20110027920 |
Attorney, Agent or Firm:
Keisuke Watanabe
Yoshihiro Yamaguchi
Yoshihiro Yamaguchi