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Title:
Method of manufacturing resist pattern
Document Type and Number:
Japanese Patent JP6330250
Kind Code:
B2
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Inventors:
Koji Ichikawa
Takayuki Miyagawa
Application Number:
JP2013040377A
Publication Date:
May 30, 2018
Filing Date:
March 01, 2013
Export Citation:
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Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
G03F7/038; C08F220/26; G03F7/004; G03F7/039; G03F7/32
Domestic Patent References:
JP2012180499A
JP2011219363A
JP2013225094A
JP2012032788A
Foreign References:
WO2013058250A1
WO2011083872A1
Attorney, Agent or Firm:
Toru Nakayama
Toru Sakamoto



 
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