Title:
少なくとも一つの電気伝導性フィルムを基板上へ蒸着させる方法
Document Type and Number:
Japanese Patent JP5731400
Kind Code:
B2
Abstract:
A method for deposition of at least one electrically conducting film on a substrate, wherein the method includes the steps of: selecting a layer of a film material, wherein the layer includes a mask on a front side, and wherein the layer and the mask are one piece; positioning the front side of the layer upon the substrate; applying at least one laser pulse onto a back side of the layer, so as to melt and to vaporize at least parts of the layer such that melt droplets are propelled toward and deposited upon the substrate; and forming the film, wherein at least one slot of the mask limits the distribution of the melt droplets.
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Inventors:
Fun Bourg Jeroen HAM
Bertram Dietrich
Kleine Johannes
Schwab Holgel
Young Edwald Double A
Gassel Andres
Wissenbach Conrad
Weddell Christian
Pilch Norbert
Strenwerk Yohen H
Bertram Dietrich
Kleine Johannes
Schwab Holgel
Young Edwald Double A
Gassel Andres
Wissenbach Conrad
Weddell Christian
Pilch Norbert
Strenwerk Yohen H
Application Number:
JP2011544961A
Publication Date:
June 10, 2015
Filing Date:
January 11, 2010
Export Citation:
Assignee:
KONINKLIJKE PHILIPS N.V.
Fraonhofel Gesellschaft Crane Forderung del Angewanten Forschung Evi
Fraonhofel Gesellschaft Crane Forderung del Angewanten Forschung Evi
International Classes:
C23C14/04; H01L21/288; H01L21/3205; H01L21/768
Domestic Patent References:
| JP10022237A | ||||
| JP2007294863A | ||||
| JP2007180123A | ||||
| JP4035981A | ||||
| JP6181260A | ||||
| JP53023570A | ||||
| JP2000031013A | ||||
| JP2007141702A | ||||
| JP2009123693A | ||||
| JP2002038257A | ||||
| JP6299339A |
Attorney, Agent or Firm:
Susumu Tsugaru
Fueda Shusen
Fueda Shusen