Title:
A polarization light irradiation device for photo alignments, and a polarization photoirradiation method for photo alignments
Document Type and Number:
Japanese Patent JP6253002
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a practical optical orientation technology capable of further enhancing in-plane homogeneity of an amount of exposure by devising a conveyance system.SOLUTION: Light from a light source constituting an elongated light-emitting part is irradiated to an irradiation region R through a polarization element unit. A conveyance system conveys a substrate S and reciprocate in a first direction passing through the irradiation region R. Boundary lines of respective polarization elements extend in the first direction. After conveyance on a forward path, the conveyance system conveys the substrate S in a second direction before conveyance on a backward path. An amount of exposure becomes uniform because positions of the boundary lines are brought into a displaced state when viewed from the substrate S.SELECTED DRAWING: Figure 6
Inventors:
Kazutoshi Shinoda
Application Number:
JP2016198327A
Publication Date:
December 27, 2017
Filing Date:
October 06, 2016
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
G02F1/1337; G02B5/30
Domestic Patent References:
| JP2007114647A | ||||
| JP7135165A | ||||
| JP2009295950A | ||||
| JP2004233708A |
Foreign References:
| US20140111849 |
Attorney, Agent or Firm:
Takaki Nishijima
Kazuko Matsuo
Fumiaki Otsuka
Yuriko Sagara
Nobuyuki Taniguchi
Yoshinori Kishi
Kazuko Matsuo
Fumiaki Otsuka
Yuriko Sagara
Nobuyuki Taniguchi
Yoshinori Kishi