Title:
PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2023020149
Kind Code:
A
Abstract:
To support a confirmation of a heating region of a heating unit against a sheet supporting a workpiece.SOLUTION: A processing device 10 comprises: a holding table that has a holding surface holding a workpiece supported via a sheet to an open of an annular frame; a frame holding unit that includes a mounting surface onto which the frame is mounted, and that holds the frame; a lifting mechanism that relatively lifts the holding surface to the mounting surface; a heating unit that heats the sheet exposed between an inner diameter of the frame and an outer diameter of the workpiece; a movement mechanism that relatively movably supports the heating unit to the holding unit; and a control unit 70. The control unit 70 includes: a setting part 71 that sets a heating condition that the heating unit heats the sheet; and a simulation part 73 that displays the heating region of the heating unit based on the heating condition set by the setting part 71 so as to be identifiable to the image of the workpiece supported via the sheet by the frame.SELECTED DRAWING: Figure 7
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Inventors:
MASADA TAKAYUKI
KAWAGUCHI YOSHIHIRO
CHO KINEN
KAWAGUCHI YOSHIHIRO
CHO KINEN
Application Number:
JP2021125357A
Publication Date:
February 09, 2023
Filing Date:
July 30, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; B26F3/00; B28D5/00; H01L21/683
Attorney, Agent or Firm:
Sakai International Patent Office