Title:
A substrate transport device, a substrate processing device, and a substrate conveying method
Document Type and Number:
Japanese Patent JP6042149
Kind Code:
B2
More Like This:
| JP2001015577 | WAFER TRANSFER APPARATUS AND WAFER STORING APPARATUS |
| JPH0671154 | GAS INDUCTION DEVICE FOR VACUUM CHAMBER |
| JP2020074440 | SUBSTRATE TRANSFER ROBOT |
Inventors:
Akihito Hatano
Application Number:
JP2012208134A
Publication Date:
December 14, 2016
Filing Date:
September 21, 2012
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/677; B25J9/06; B65G49/06; B65G49/07
Domestic Patent References:
| JP2011238870A | ||||
| JP2006178476A | ||||
| JP201098130A | ||||
| JP200988222A | ||||
| JP2005150528A | ||||
| JP201313944A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita