Title:
A substrate upper surface detecting method and a scribing device
Document Type and Number:
Japanese Patent JP5912395
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To solve such the problem that when the upper position of a scribing head is defined as an origin when detecting a distance to a substrate on a scribing device etc., the origin positions are different by scribing devices, and a common recipe table can not be generated.SOLUTION: A distance d1 to a table is calculated using a non-contact sensor, a distance d2 to a reference block is calculated, and the difference Δd is held. The scribing head is lowered to abut against the reference block, and the difference between a cutting edge and the table is detected to represent the position of the scribing head with the top surface of the table as a zero-point position. Consequently, a recipe table in which a scribing method including a thickness of the substrate with the top surface of the table as the zero point is described is generated to perform scribing processing on a brittle material substrate of the same kind regardless the types of the scribing devices.
Inventors:
Yoshida Keigo
Okajima Yasutomo
Hayashi Shokei
Okajima Yasutomo
Hayashi Shokei
Application Number:
JP2011226517A
Publication Date:
April 27, 2016
Filing Date:
October 14, 2011
Export Citation:
Assignee:
Samsung Diamond Industry Co., Ltd.
International Classes:
B28D5/00; B28D1/24
Domestic Patent References:
| JP2001345290A |
Foreign References:
| WO2008126502A1 |