Title:
CHUCK TABLE OF PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2018074101
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a chuck table of a processing device which can suppress peeling charge occurring when a workpiece is peeled off from the chuck table.SOLUTION: A processing apparatus, i.e., a cleaning device, includes a chuck table 1 for holding a workpiece, with adhesive tape stuck on back side, on a holding surface 1a, and a cleaning unit for cleaning the workpiece W held on the chuck table 1. In the holding surface 1a of the chuck table 1, a resin layer of an adhesive tape T and a frictional electrification series are composed of an equivalent material, and thereby peeling charge of the workpiece W is suppressed.SELECTED DRAWING: Figure 3
Inventors:
URITA NAONORI
NITTA HIDEJI
YAGIHARA JUN
ESUMI KAZUYA
NITTA HIDEJI
YAGIHARA JUN
ESUMI KAZUYA
Application Number:
JP2016216264A
Publication Date:
May 10, 2018
Filing Date:
November 04, 2016
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/683; H01L21/301; H01L21/304
Domestic Patent References:
| JP2010283286A | 2010-12-16 | |||
| JP2002368068A | 2002-12-20 | |||
| JP2011108979A | 2011-06-02 |
Foreign References:
| WO2016021239A1 | 2016-02-11 |
Attorney, Agent or Firm:
Sakai International Patent Office