Title:
ACTUATOR, AND METHOD FOR DRIVING ACTUATOR
Document Type and Number:
WIPO Patent Application WO/2012/026055
Kind Code:
A1
Abstract:
A method for driving an actuator, wherein the actuator is provided with a first electrode, a piezoelectric body layer configured from (Bi, Na, Ba)TiO3, and a second electrode, the piezoelectric body layer is sandwiched between the first electrode and the second electrode, the +X direction, the +Y direction, and the +Z direction are the [100] direction, the [01-1] direction, and the [011] direction, respectively, the piezoelectric body layer is preferentially oriented in the +Z direction, and a potential difference is applied between the first electrode and the second electrode to thereby drive the actuator. Consequently, unnecessary deformation when the actuator is driven is suppressed.
Inventors:
UEDA MICHIHITO
HARIGAI TAKAKIYO
TANAKA YOSHIAKI
ADACHI HIDEAKI
FUJII EIJI
HARIGAI TAKAKIYO
TANAKA YOSHIAKI
ADACHI HIDEAKI
FUJII EIJI
Application Number:
PCT/JP2011/003400
Publication Date:
March 01, 2012
Filing Date:
June 15, 2011
Export Citation:
Assignee:
PANASONIC CORP (JP)
UEDA MICHIHITO
HARIGAI TAKAKIYO
TANAKA YOSHIAKI
ADACHI HIDEAKI
FUJII EIJI
UEDA MICHIHITO
HARIGAI TAKAKIYO
TANAKA YOSHIAKI
ADACHI HIDEAKI
FUJII EIJI
International Classes:
B81B3/00; B41J2/16; C23C14/08; H01L41/09; H01L41/18; H01L41/22; H01L41/313; H01L41/39; H02N2/00
Foreign References:
| JP2009286119A | 2009-12-10 | |||
| JP2009049065A | 2009-03-05 | |||
| JP2005203725A | 2005-07-28 |
Attorney, Agent or Firm:
NAITO, Hiroki et al. (JP)
Hiroki Naito (JP)
Hiroki Naito (JP)
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Claims:
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