INTERNAL FAULT INSPECTION METHOD AND DEVICE

WIPO Patent Application WO/2012/026054

A1

The purpose of the present invention is to provide an internal fault inspection method and device that excite ultrasonic waves in a sample in a non-contact manner, without damaging the sample, and detect the ultrasonic waves from faults inside the sample in a non-contact and highly-sensitive manner, without being affected by the sample surface. The present invention is characterized in that ultrasonic waves are emitted from an ultrasonic wave transmission unit toward a sample and the ultrasonic waves reflected from the sample are detected as an interference signal by an image formation type common path interferometer, and an ultrasonic wave signal is obtained from the interference signal and faults inside the sample are detected from the ultrasonic wave signal.

JPH09189687	ULTRASONIC MICROSCOPE
JP7326292	Apparatus and method for determining the position of a target structure on a substrate
JP7346249	Ultrasonic flaw detection inspection equipment and reflection source identification method

NAKATA TOSHIHIKO (JP)
MATSUI TETSUYA (JP)
TACHIZAKI TAKEHIRO (JP)
YOSHIMURA KAZUSHI (JP)
WATANABE MASAHIRO (JP)

PCT/JP2011/003072

March 01, 2012

June 01, 2011

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HITACHI LTD (JP)
NAKATA TOSHIHIKO (JP)
MATSUI TETSUYA (JP)
TACHIZAKI TAKEHIRO (JP)
YOSHIMURA KAZUSHI (JP)
WATANABE MASAHIRO (JP)

G01N29/06

JPH09318603A	1997-12-12
JP2008286518A	2008-11-27
JP2004089310A	2004-03-25
JP2009150692A	2009-07-09
JP2007046938A	2007-02-22

INOUE, Manabu et al. (JP)
Manabu Inoue (JP)

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