Title:
ATOMIC LAYER GROWTH DEVICE AND ATOMIC LAYER GROWTH DEVICE EXHAUST UNIT
Document Type and Number:
WIPO Patent Application WO/2016/190006
Kind Code:
A1
Abstract:
The present invention is provided with: a cylindrical exhaust piping connection part that is attached to the outside of an exhaust opening, which is provided in a film-formation container, that has an outer-circumferential surface that is larger than the opening, and that has an exhaust path positioned on a cylindrical-hole side thereof; and a cylindrical exhaust adhesion-prevention material that is inserted into and attached at the opening so as to be located on the inside of the film-formation container and that has the exhaust path positioned on a cylindrical-hole side thereof. The exhaust piping connection part is provided with: a connection part inactive-gas supply path, which is demarcated from the exhaust path and through which an inactive gas flows; and a connection part inactive-gas supply port, which is provided to the connection part inactive-gas supply path and through which the inactive gas flows out toward an opening side. The exhaust adhesion-prevention material is provided with: an adhesion-prevention material inactive-gas supply path, which is demarcated from the exhaust path, is formed from a gap that is between the adhesion-prevention material and an inner-circumferential surface of the opening and between the adhesion-prevention material and a film-formation container inner wall that surrounds the opening, and communicates with the connection part inactive-gas supply port; and an adhesion-prevention material inactive-gas discharge port, which is provided to the adhesion-prevention material inactive-gas supply path and through which the inactive gas flows out into the film-formation container.
Inventors:
MATSUMOTO TATSUYA (JP)
WASHIO KEISUKE (JP)
WASHIO KEISUKE (JP)
Application Number:
PCT/JP2016/062401
Publication Date:
December 01, 2016
Filing Date:
April 19, 2016
Export Citation:
Assignee:
JAPAN STEEL WORKS LTD (JP)
International Classes:
C23C16/44; H01L21/31
Foreign References:
| JPH08186081A | 1996-07-16 | |||
| JPS61163279A | 1986-07-23 | |||
| JPH06140379A | 1994-05-20 | |||
| JPH01183113A | 1989-07-20 | |||
| JPS6376880A | 1988-04-07 | |||
| JPH07201754A | 1995-08-04 |
Attorney, Agent or Firm:
YOKOI Koki (JP)
Koki Yokoi (JP)
Koki Yokoi (JP)
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